Specific Process Knowledge/Characterization/SEM Supra 3: Difference between revisions
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=SEM Supra 3= | =SEM Supra 3= | ||
The SEM Supra 3 is a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation. | The SEM Supra 3 is a scanning electron microscope (SEM). It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation. | ||
This SEM is equipped two secondary electron (SE) detectors: An SE2 detector located on one side inside the chamber and an Inlens detector located inside the column. | |||
The SEM also has an a HDAsB (High Definition four quadrant Angular Selective Backscattered electron) detector. This detector is sitting at the end of the column where the final cap is placed in the other SEMs. To avoid collision between the HDAsB detector and samples/sample holders, a set of rules have been introduced on the SEM Supra 3 that most importantly implies that the sample holder and the sample dimensions have to be noted in the software. | |||
The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber and using a dedicated VPSE detector it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the SE2 and InLens detectors will no longer work. | |||
The SEM Supra 3 is located in the cleanroom. It was installed in September 2015. | The SEM Supra 3 is located in the cleanroom. It was installed in September 2015. | ||