Jump to content

Specific Process Knowledge/Thermal Process/D4 III-V Oven: Difference between revisions

Mmat (talk | contribs)
mNo edit summary
Mmat (talk | contribs)
 
Line 24: Line 24:


'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=187 III-V Oven (D4)]'''
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=187 III-V Oven (D4)]'''
==Process knowledge==
*[[Specific_Process_Knowledge/Thermal_Process/Oxidation/Oxidation_on_III-V_furnace_(D4)|Standard wet oxidation recipe on the III-V furnace]]


==Overview of the performance of the III-V Oven and some process related parameters==
==Overview of the performance of the III-V Oven and some process related parameters==