Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
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== Optical Profilers == | == Optical Profilers == | ||
An optical profiler, f.ex. [[Specific Process Knowledge/Characterization/ | An optical profiler, f.ex. [[Specific Process Knowledge/Characterization/Sensofar S Neox|Sensofar S Neox]], provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument. | ||
The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution. | The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution. | ||