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=Nanofabrication of Inductive Components for Integrated Power Supply On Chip =
=Nanofabrication of Inductive Components for Integrated Power Supply On Chip =
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*'''Project responsible:''' Hoà Lê Thanh
*'''Project responsible:''' Hoà Lê Thanh
*'''Supervisors:''' Flemming Jensen (Main), Anpan Han (Co), Ziwei Ouyang (Co), Arnold Knott (CO)
*'''Supervisors:''' Flemming Jensen (Main), Anpan Han (Co), Ziwei Ouyang (Co), Arnold Knott (CO)
*'''Partners involved:''' DTU Danchip, DTU Elektro
*'''Partners involved:''' DTU Nanolab (former DTU Danchip), DTU Elektro




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configuration at both terminals for wafer-level probing. Four 800 µm by 800 µm pads at the corners are for flip-chip bonding. (b) 1:1 toroidal transformer. The primary coil has larger conductors than that of the secondary coil. (c) solenoid inductor, (d) spiral inductor, (e) "DTU" inductor.
configuration at both terminals for wafer-level probing. Four 800 µm by 800 µm pads at the corners are for flip-chip bonding. (b) 1:1 toroidal transformer. The primary coil has larger conductors than that of the secondary coil. (c) solenoid inductor, (d) spiral inductor, (e) "DTU" inductor.


=Technology Development=
=Process Development=


[[/Air-core Inductor|Air-core Inductor]]
[[/Air-core Inductor|Air-core Inductor]]