LabAdviser/Technology Research/Nanofabrication of Inductive Components for Integrated Power Supply On Chip: Difference between revisions
Appearance
mNo edit summary |
|||
| (2 intermediate revisions by 2 users not shown) | |||
| Line 1: | Line 1: | ||
'''Feedback to this page''': '''[mailto:labadviser@ | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Technology_Research/Nanofabrication_of_Inductive_Components_for_Integrated_Power_Supply_On_Chip click here]''' | ||
=Nanofabrication of Inductive Components for Integrated Power Supply On Chip = | =Nanofabrication of Inductive Components for Integrated Power Supply On Chip = | ||
| Line 5: | Line 5: | ||
*'''Project responsible:''' Hoà Lê Thanh | *'''Project responsible:''' Hoà Lê Thanh | ||
*'''Supervisors:''' Flemming Jensen (Main), Anpan Han (Co), Ziwei Ouyang (Co), Arnold Knott (CO) | *'''Supervisors:''' Flemming Jensen (Main), Anpan Han (Co), Ziwei Ouyang (Co), Arnold Knott (CO) | ||
*'''Partners involved:''' DTU Danchip, DTU Elektro | *'''Partners involved:''' DTU Nanolab (former DTU Danchip), DTU Elektro | ||
| Line 67: | Line 67: | ||
configuration at both terminals for wafer-level probing. Four 800 µm by 800 µm pads at the corners are for flip-chip bonding. (b) 1:1 toroidal transformer. The primary coil has larger conductors than that of the secondary coil. (c) solenoid inductor, (d) spiral inductor, (e) "DTU" inductor. | configuration at both terminals for wafer-level probing. Four 800 µm by 800 µm pads at the corners are for flip-chip bonding. (b) 1:1 toroidal transformer. The primary coil has larger conductors than that of the secondary coil. (c) solenoid inductor, (d) spiral inductor, (e) "DTU" inductor. | ||
= | =Process Development= | ||
[[/Air-core Inductor|Air-core Inductor]] | [[/Air-core Inductor|Air-core Inductor]] | ||