Specific Process Knowledge/Characterization/SEM Tabletop 1: Difference between revisions
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The SEM Tabletop 1 is a scanning electron microscope. It produces enlarged images of a variety of specimens with good resolution, large depth of field, and minimal sample preparation. | The SEM Tabletop 1 is a scanning electron microscope. It produces enlarged images of a variety of specimens with good resolution, large depth of field, and minimal sample preparation. | ||
In this SEM little effort is required to obtain decent SEM images. However, the tabletop SEM has a limited resolution and a limited number of settings you can optimize compared to the other SEMs at Nanolab. For inspection of samples with structures in the micrometer range it is very fast and easy to use. Unlike the other SEMs at Nanolab it is not necessary to take the SEM Tool Package Training course to be authorized to use the tabletop SEM. | In this SEM little effort is required to obtain decent SEM images. However, the tabletop SEM has a limited resolution and a limited number of settings you can optimize compared to the other SEMs at Nanolab. For inspection of samples with structures in the micrometer range it is very fast and easy to use. Unlike the other SEMs at Nanolab it is not necessary to take the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM Tool Package Training course] | ||
to be authorized to use the tabletop SEM. | |||
The tabletop SEM was installed at DTU Nanolab in January 2017. It has a thermionic filament made of tungsten and is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector. The chamber is relatively small, so sample loading is fast and easy. The stage is moved manually in the X and Y by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle. | The tabletop SEM was installed at DTU Nanolab in January 2017. It has a thermionic filament made of tungsten and is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector. The chamber is relatively small, so sample loading is fast and easy. The stage is moved manually in the X and Y by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle. | ||