Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing: Difference between revisions
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*A bit tricky for first time use | *A bit tricky for first time use | ||
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The output is a single JDI file containing all modulation tables named '''MODx''', where x is a running number from 1 to '''m'''. The array and reference to each modulation table can then be set up in the JDF file as seen below. It is convenient to use the include command '''@''' to reference the JDI file itself rather than copy-paste the tables into the JDF. | The output is a single JDI file containing all modulation tables named '''MODx''', where x is a running number from 1 to '''m'''. The array and reference to each modulation table can then be set up in the JDF file as seen below. It is convenient to use the include command '''@''' to reference the JDI file itself rather than copy-paste the tables into the JDF. | ||
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