Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing: Difference between revisions
| Line 152: | Line 152: | ||
=Scripted expansion of a PEC modulation table= | =Scripted expansion of a PEC modulation table= | ||
The last method is basically the same as the second method above but with support for PEC modulation. This is achieved by expanding the dose modulation table into a set of tables, one for each dose of the dose test. Each modulation table is a scaled version of the initial modulation table, scaled simply by the dose test scaling between each dose. The scaling is done through a Matlab script which can be found here. Since Labadviser does not allow upload of .m files, simply copy the script from below and save as a .m file. | The last method is basically the same as the second method above but with support for PEC modulation. This is achieved by expanding the dose modulation table into a set of tables, one for each dose of the dose test. Each modulation table is a scaled version of the initial modulation table, scaled simply by the dose test scaling between each dose. The scaling is done through a Matlab script which can be found here. Since Labadviser does not allow upload of .m files, simply copy the script from below and save as a .m file. | ||
Benefits: | |||
*Supports PEC modulation | |||
*Faster execution since it is a single SDF sequence | |||
Drawbacks: | |||
*A bit tricky for first time use | |||
{| class = "collapsible" width=65% style = "border-radius: 10px; border: 1px solid #CE002D;" | {| class = "collapsible" width=65% style = "border-radius: 10px; border: 1px solid #CE002D;" | ||
| Line 165: | Line 172: | ||
%Input variables for modulation table | %Input variables for modulation table | ||
inputJDI = 'C:\Users\thope\Desktop\MODMOD\acmossingle.jdi'; | inputJDI = 'C:\Users\thope\Desktop\MODMOD\acmossingle.jdi'; | ||
outputJDI = ' | outputJDI = 'thopeExpanded.jdi'; | ||
m = 9; %number of doses | m = 9; %number of doses | ||
modulation = 10; %modulation between instances in percent, must be positive | modulation = 10; %modulation between instances in percent, must be positive | ||