Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system: Difference between revisions
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<i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b><br> | <i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b><br> | ||
All images and photos on this page belonges to <b>DTU Nanolab</b></i>.<br> | All images and photos on this page belonges to <b>DTU Nanolab</b></i>.<br> | ||
[[Category: Equipment|Thin film Sputter deposition Lesker]] | [[Category: Equipment|Thin film Sputter deposition Lesker]] | ||
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Additional information about the processes and equipment performace can be found here: | Additional information about the processes and equipment performace can be found here: | ||
*Pre-acceptance test [[ | *Pre-acceptance test [[:File:Cluster-based multi-chamber high vacuum sputtering deposition system pre acceptance.pptx]] | ||
*Acceptance test [[ | *Acceptance test [[:File:Cluster Lesker P1 and P3 Acceptance test FOR LA PUBLICATION.pdf]] | ||