Specific Process Knowledge/Characterization/XPS/XPS Depth profiling: Difference between revisions
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* Polysilicon | * Polysilicon | ||
[[File:profile sandwich 3.PNG|700px|{{photo1}]] | [[File:profile sandwich 3.PNG|700px|{{photo1}}]] | ||
In the spectra required to make such a depth profile, one can distinguish the various chemical environments of silicon depending on whether it is bonded to: | In the spectra required to make such a depth profile, one can distinguish the various chemical environments of silicon depending on whether it is bonded to: | ||