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Specific Process Knowledge/Lithography/5214E: Difference between revisions

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==Spin coating==
==Spin coating==
[[Image:5214Espincurves.JPG|500x500px|thumb|Spin curves for AZ 5214E using a 30 s spin-off, and a 60s @ 90°C softbake]]
[[Image:5214Espincurves.JPG|500x500px|thumb|Spin curves for AZ 5214E (old German version) using a 30 s spin-off, and a 60s @ 90°C softbake]]


'''Typical spin parameters:'''
'''Typical spin parameters:'''