Specific Process Knowledge/Thermal Process/A2 Gate Oxide furnace: Difference between revisions
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[[Category: Thermal process|Furnace]] | [[Category: Thermal process|Furnace]] | ||
[[Category: Furnaces|A2]] | [[Category: Furnaces|A2]] | ||
==Gate Oxide furnace (A2)== | ==Gate Oxide furnace (A2)== | ||
[[Image:borpredep.jpg|thumb|300x300px|Gate Oxide furnace (A2). Positioned in cleanroom B-1]] | [[Image:borpredep.jpg|thumb|300x300px|Gate Oxide furnace (A2). Positioned in cleanroom B-1]] | ||