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Specific Process Knowledge/Lithography/5214E: Difference between revisions

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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,716 edits
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'''Typical spin parameters:'''
'''Typical spin parameters:'''
*Spin off: 30-60 s
*Spin off: 30-60 s
*Soft bake: 60s @ 90°C
*Soft bake: 60 s @ 90°C


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