Specific Process Knowledge/Lithography/Coaters/GammaUV: Difference between revisions
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The system handles 4" and 6" wafers without size conversion, and can be set up to handle 2" or 8". | The system handles 4" and 6" wafers without size conversion, and can be set up to handle 2" or 8". | ||
The coater is equipped with 3 different | The coater is equipped with 3 different resist lines, as well as 1 syringe line: | ||
*AZ MiR 701 | *AZ MiR 701 | ||
*AZ nLOF 2020 | *AZ nLOF 2020 | ||