Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace: Difference between revisions
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*Silicon wafers (RCA cleaned) | *Silicon wafers (RCA cleaned) | ||
*Wafers coming | *Wafers coming from the Phosphorus Pre-dep furnace that have been BHF etched in the dedicated bath in the RCA bench can go directly into the furnace | ||
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