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| [[file:S004031-03.jpg |120px|frameless ]] | | [[file:S004031-03.jpg |120px|frameless ]] |
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| ! colspan="10" | [[Main Page/Process Logs/jmli/Pegasus/SOI/polySOI10-b | Later runs of this recipe]]
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| |}
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| {| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
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| |+ '''Process runs'''
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| |-
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| ! rowspan="2" width="40"| Date
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| ! colspan="4" width="120"| Substrate Information
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| ! colspan="4" | Process Information
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| ! rowspan="2" width="500" |SEM Images
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| |-
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| ! width="30" | Wafer info
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| ! width="40" | Mask
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| ! width="40" | Material/ Exposed area
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| ! width="40" | Tool / Operator
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| ! width="40" | Conditioning
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| ! width="40" | Recipe
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| ! width="40" | Wafer ID
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| ! width="40" | Comments
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| |- | | |- |
| | 28/8-2014 | | | 28/8-2014 |
