Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cduv: Difference between revisions
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| Line 23: | Line 23: | ||
| Pegasus/jmli | | Pegasus/jmli | ||
| 10 minute TDESC clean + 45 sec barc etch | | 10 minute TDESC clean + 45 sec barc etch | ||
| danchip/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes | | danchip/jml/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes | ||
| S004675 | | S004675 | ||
! Old showerhead | ! Old showerhead | ||
| Line 41: | Line 41: | ||
| Pegasus/jmli | | Pegasus/jmli | ||
| 10 minute TDESC clean + 45 sec barc etch | | 10 minute TDESC clean + 45 sec barc etch | ||
| danchip/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes | | danchip/jml/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes | ||
| S004675 | | S004675 | ||
! New showerhead | ! New showerhead | ||