Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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== The Molecular Vapor Deposition tool == | == The Molecular Vapor Deposition tool == | ||
[[image:Mvd.jpg|200x200px|right|thumb|The MVD is located in cleanroom | [[image:Mvd.jpg|200x200px|right|thumb|The MVD is located in cleanroom D-3]] | ||
The Applied Microstructures MVD 100 system deposits molecular films on surfaces. These films serve a wide range of purposes ranging from antistiction coatings of nanoimprint lithography stamps to protecting MEMS structures. At Danchip the MVD is an essential tool for nanoimprint lithography, where it is used to create antistiction coatings on the imprint stamps. | The Applied Microstructures MVD 100 system deposits molecular films on surfaces. These films serve a wide range of purposes ranging from antistiction coatings of nanoimprint lithography stamps to protecting MEMS structures. At Danchip the MVD is an essential tool for nanoimprint lithography, where it is used to create antistiction coatings on the imprint stamps. | ||