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Specific Process Knowledge/Lithography/Descum/PlasmaAsher2: Revision history

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11 December 2024

  • curprev 13:1313:13, 11 December 2024 Jehem talk contribs 1,783 bytes +1,783 Created page with "''Jitka Urbánková & Jesper Hanberg, December 2019'' 640px|thumb|Descum results plasma asher 2 - recipe 1 <span style="color:red">This tool has been decomissioned 2024-12-02.</span> The user manual(s), quality control procedure(s) and results and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=200 LabManager] - '''requires login''' Descum of AZ Mir 701 resist on 100mm silicon wafer. F..."
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