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Specific Process Knowledge/Lithography/Descum/plasmaAsher03: Revision history

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12 January 2026

  • curprev 11:1311:13, 12 January 2026 Jehem talk contribs 2,575 bytes +2,575 Created page with "=Plasma Asher 3: Descum= Product name: Diener Pico Plasma Asher<br> Year of purchase: 2014 The user manual(s), quality control procedure(s) and results and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=423 LabManager] - '''requires login''' Plasma Asher 3 is specifically used for controlled descum process after lithography. Please note that you only can process a single 100 mm wafer, or one small sample, at a t..."
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