View source for Template:Peg1Table9Row

! rowspan="3" |  {{{RecipeName}}}
| colspan="20" style="text-align:left"| <span title="Information about prior process steps" > {{{PriorProcessSteps}}}</span>
! <span title="Actual pressures in the format (D;B;E) where D=dep, B=break and E=etch">{{{ActualPressure}}}</span>
! <span title="Link to recipe">{{{Link2RecipeRun}}}</span>
|-

|style="background:darkorange; color:black;" |<span title="Platen temperature (deg C)">{{{Temperature}}}</span>
|style="background:silver; color:black;" |<span title="Start and End at Etch or Dep cycle">{{{StartCycleEndCycle}}}</span>
|style="background:darkgray; color:black;" |<span title="Dep time (s)">{{{DepositionTime}}}</span>
|style="background:greenyellow; color:black;" |<span title="Dep Delay pressure (mTorr or APC percentage)">{{{PressureDepDelay}}}</span>
|style="background:chartreuse; color:black;" |<span title="Dep Boost pressure (mTorr or APC percentage)">{{{PressureDepBoost}}}</span>
|style="background:lawngreen; color:black;" |<span title="Dep Main pressure (mTorr or APC percentage)">{{{PressureDepMain}}}</span>
|style="background:lightcoral; color:black;" |<span title="C4F8 Dep Delay flow (sccm)">{{{C4F8DepDelay}}}</span>
|style="background:salmon; color:black;" |<span title="C4F8 Dep Dep Boost flow (sccm)">{{{C4F8DepBoost}}}</span>
|style="background:darksalmon; color:black;" |<span title="C4F8 Dep Main flow (sccm)">{{{C4F8DepMain}}}</span>
|style="background:lightsteelblue; color:black;" |<span title="SF6 Dep Delay flow (sccm)">{{{SF6DepDelay}}}</span>
|style="background:powderblue; color:black;" |<span title="SF6 Dep Boostflow (sccm)">{{{SF6DepBoost}}}</span>
|style="background:skyblue; color:black;" |<span title="SF6 Dep Main flow (sccm)">{{{SF6DepMain}}}</span>
|style="background:cyan; color:black;" |<span title="Coil Dep power (W)">{{{WCoilDep}}}</span>
|style="background:lavender; color:black;" colspan="3" align="center"|<span title="Platen generator Dep power (W)">{{{WPlatenDep}}}</span>
|style="background:cyan; color:black;"|<span title="Coil matching unit Dep Load (%)">{{{%CoilDepLoad}}}</span>
|style="background:gainsboro; color:black;"    |<span title="Coil matching unit Dep Tune (%)">{{{%CoilDepTune}}}</span>
|style="background:purple; color:black;"|<span title="Platen matching unit Etch Load (%)">{{{%PlatenEtchLoad}}}</span>
|style="background:gainsboro; color:black;"|<span title="Platen matching unit Etch Tune (%)">{{{%PlatenEtchTune}}}</span>
! colspan="2" rowspan="2"|  <span title="Keywords">{{{Keywords}}}</span>  
|-
|style="background:gainsboro; color:white;" |<span title="Platen generator high (13.56 MHz or HF) or low (380 kHz or LF) frequency">{{{PlatenFrequency}}}</span>
|style="background:dimgray; color:white;" |<span title="Number of cycles">{{{NumberOfCycles}}}</span>
|style="background:gray; color:white;" |<span title="Etch time (s)">{{{EtchTime}}}</span>
|style="background:mediumspringgreen; color:white;" |<span title="Etch Delaypressure (mTorr or APC percentage)">{{{PressureEtchDelay}}}</span>
|style="background:seagreen; color:white;" |<span title="Etch Boost pressure (mTorr or APC percentage)">{{{PressureEtchBoost}}}</span>
|style="background:forestgreen; color:white;" |<span title="Etch Main pressure (mTorr or APC percentage)">{{{PressureEtchMain}}}</span>
|style="background:crimson; color:white;" |<span title="C4F8 Etch Delay flow (sccm)">{{{C4F8EtchDelay}}}</span>
|style="background:firebrick; color:white;" |<span title="C4F8 Etch Boost flow (sccm)">{{{C4F8EtchBoost}}}</span>
|style="background:darkred; color:white;" |<span title="C4F Etch Main flow (sccm)">{{{C4F8EtchMain}}}</span>
|style="background:deepskyblue; color:white;"|<span title="SF6 Etch Delay flow (sccm)">{{{SF6EtchDelay}}}</span>
|style="background:dodgerblue; color:white;" |<span title="SF6 Etch Boostflow (sccm)">{{{SF6EtchBoost}}}</span>
|style="background:cornflowerblue; color:white;"|<span title="SF6 Etch Main flow (sccm)">{{{SF6EtchMain}}}</span>
|style="background:darkturquoise; color:white;" |<span title="Coil generator Etch power (W)">{{{WCoilEtch}}}</span>
|style="background:mediumorchid; color:white;"|<span title="Platen generator Etch Delay power (W)">{{{WPlatenEtchDelay}}}</span>
|style="background:mediumpurple; color:white;"|<span title="Platen generator Etch Boost power (W)">{{{WPlatenEtchBoost}}}</span>
|style="background:blueviolet; color:white;"|<span title="Platen generator Etch Main power (W)">{{{WPlatenEtchMain}}}</span>
|style="background:darkturquoise; color:white;"|<span title="Coil matching unit Etch Load (%)">{{{%CoilEtchLoad}}}</span>
| style="background:gainsboro; color:black;"|<span title="Coil matching unit Etch Tune (%)">{{{%CoilEtchTune}}}</span>
|style="background:lavender; color:black;"|<span title="Platen matching unit Dep Load (%)">{{{%PlatenDepLoad}}}</span>
|style="background:gainsboro; color:black;"|<span title="Platen matching unit Dep Tune (%)">{{{%PlatenDepTune}}}</span>
|-

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|style="background:gainsboro; color:black;" |<span title="Platen Up or Down position">{{{PlatenPosition}}}</span>

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|style="background:chocolate; color:black;"|<span title="Claritas generator Dep power (W)">{{{WClaritasDep}}}</span>
|style="background:chocolate; color:white;"|<span title="Claritas generator Etch power (W)">{{{WClaritasEtch}}}</span>


|style="background:chocolate; color:black;"| <span title="Claritas matching unit Load ">{{{%CLaritasLoad}}}</span>
|style="background:chocolate; color:white;"| <span title="Claritas matching unit Tune">{{{%ClaritasTune}}}</span>


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