LabAdviser

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Photos: DTU Nanolab

Unless otherwise stated, this page is written by DTU Nanolab internal

LabAdviser is a wiki designed for users of the DTU Nanolab facilities. If you are not a current user you are free to surf around, and also please take a look at our homepage. You can also take a virtual tour of the DTU Nanolab cleanroom facility or explore our YouTube channel with a selection of training videos.

LabAdviser contains information about

  • Equipment for micro- and nanofabrication in the DTU Nanolab cleanroom facility in building 346 and surroundings (in building 346 and 347)
  • Characterization equipment, primarily electron microscopy, in building 314 and 307.
  • Fabrication steps in micro- and nanofabrication that take place at the cleanroom fabrication facility and surroundings; and
  • Electron microscopy methods that take place in building 314/307.

An overview of the equipment in these facilities is given and some fabrication process flows and singles fabrication steps are described. In general LabAdviser is meant to help you find the right equipment and give you a good starting point for micro- and nanofabrication as well as for electron microscopy. This should not replace communication with the staff of the facilities but we recommend reading LabAdviser material as preparation before contacting staff. To be able to edit LabAdviser you need to log in with your DTU login (only for staff of the facilities). If you need further information about certain machinery or processes, please contact the relevant staff. Feedback and input is welcome by email to: labadviser@nanolab.dtu.dk


News in LabAdviser:

Contents

Take a virtual tour in the DTU Nanolab cleanroom [[1]]
DTU Nanolab on YouTube [[2]]





Overview of micro and nano fabrication steps - a guide to where you can find fabrication information in LabAdviser

All drawings in this section done by Jesper Hanberg @DTU Nanolab

Click on [show] and see choices to the right

- - -
Clean your sample Dry your sample Create a thin film on your sample Dope your sample
Thermal treatment of your sample Make a mask on your sample Transfer pattern to your sample Define your structure directly
Bond your samples together Characterize your sample Pack your sample Process flow examples


Contact Information for the DTU Nanolab fabrication part

In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab (formerly known as Danchip).

Subject Email Description
Training and Process Flow training@nanolab.dtu.dk All requests regarding equipment training and process flows. Please add your Name to the subject line.

Note: Requests are commonly answered within 2 workdays.
E-beam training e-beam@nanolab.dtu.dk Requests regarding training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on the EBL Labadviser pages beforehand.
E-beam Cassette loading e-beamload@nanolab.dtu.dk Requests regarding cassette loading on JEOL JBX-9500FSZ.
General inquiries nanolabsupport@nanolab.dtu.dk Inquiries related to machines, cleanroom access, Mask review, tool changes, and others. Please add your Name to the subject line.

Note: Requests are commonly answered within 2 workdays.
Metal Wishes metal@nanolab.dtu.dk Requests for change of metal in Thin Film Deposition equipment.
See current and future materials in statuslog of the respective machines.


Lesker - status log
E-Beam Evaporator (Temescal) - status log
E-Beam Evaporator (10-pockets) - status log
Sputter-System Metal-Oxide(PC1) - status log
Sputter-System Metal-Nitride(PC3) - logbook

For requests regarding Wordentec, please contact the Thin Film group directly.

Gas-related Requests DCH-Gas@nanolab.dtu.dk All topics gas-related (issues, information regarding ordering, delivery, changing etc). Mostly for internal DTU Nanolab use.
LabAdviser Mailbox labadviser@nanolab.dtu.dk Any questions or feedback to LabAdviser.
Commercial Inquiries sales@nanolab.dtu.dk For all inquiries regarding in-sourcing, commercial applications, rent of cleanroom space, etc


DTU Nanolab Fabrication Cleanroom Naming and Phone Numbers

Cleanroom building 346 ground floor


Drawing: DTU CAS Digital


Room number Where in the room Phone number
A-1 At III-V RIE 55 804
Ax2 At the Lesker 55 815
A-5 In the corner near the furnace/plasma asher 55 803
B-1 In the corridor 55 806
C-1 At the corridor 55 808
D-1 The entrance room 55 703
D-3 At the KOH 55 940
E-1 By the e-beam computers 55 943
E-5/E-4 By the MLAs in E-5, by mask aligner in E-4 55 946
E-6 Furnace 6" 55 948
F-1 III-V growth 55 949
F-2 To the right of the XRD and Ellipsometer 55 941
F-3 DUV Stepper 55 947
Basement 901 Injection molder room in the basement 55 812
Basement 904 To the right of the AFM 55 813


Basement building 346 phase 1

Drawing: DTU CAS Digital



DTU Nanolab building 314 and Phone Numbers


Drawing: DTU CAS Digital



Room number Description Phone number
314-011 QFEG 200 Cryo ESEM 56 406
314-014 Tecnai T20 56 407
314-032 Prep room 1 No phone
314-034 AFEG 250 ESEM 56 414
314-037 Titan ETEM 56 418
314-040 Prep room 2 (Bio) 56 413
314-042 Titan ATEM 56 409
314-060 Nova NanoSEM 600 56 412
314-061 Helios Nanolab 56 411