Specific Process Knowledge/Thin film deposition/Deposition of polysilicon/Deposition of polysilicon using LPCVD/Standard recipes, QC limits and results for the 6" polysilicon furnace: Revision history

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curprev 11:0611:06, 11 May 2023‎ Paphol talk contribs‎ 7,473 bytes 0‎ No edit summary
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curprev 13:5413:54, 5 August 2022‎ Pevo talk contribs‎ 7,388 bytes +4‎ →‎Expected results when using the standard recipe on the 6" LPCVD polySi furnace:
curprev 13:5313:53, 5 August 2022‎ Pevo talk contribs‎ 7,384 bytes +970‎ →‎Amorphous Si measurement
curprev 13:2913:29, 5 August 2022‎ Pevo talk contribs‎ 6,414 bytes +108‎ →‎Amorphous Si measurement
curprev 12:1912:19, 5 August 2022‎ Pevo talk contribs‎ 6,306 bytes +616‎ →‎Expected results when using the standard recipe on the 6" LPCVD polySi furnace:

curprev 14:5114:51, 16 November 2018‎ Pevo talk contribs‎ 5,523 bytes −2‎ →‎Process parameters for the standard recipes on the 6" LPCVD polySi furnaces:
curprev 14:5114:51, 16 November 2018‎ Pevo talk contribs‎ 5,525 bytes −3‎ →‎Expected results when using the standard recipe on the 6" LPCVD polySi furnace:

curprev 13:4913:49, 26 June 2017‎ Pevo talk contribs‎ 5,528 bytes +1‎ No edit summary

curprev 14:4214:42, 11 February 2015‎ Paphol talk contribs‎ 5,527 bytes +299‎ →‎Expected results when using the standard recipe on the 6" LPCVD polySi furnace:
curprev 10:4410:44, 11 February 2015‎ Paphol talk contribs‎ 5,228 bytes +55‎ →‎Expected results when using the standard recipe on the 6" LPCVD polySi furnace:
curprev 10:3510:35, 11 February 2015‎ Paphol talk contribs‎ 5,173 bytes 0‎ →‎Process parameters for the standard recipes on the 6" LPCVD polySi furnaces:
curprev 10:3010:30, 11 February 2015‎ Paphol talk contribs‎ 5,173 bytes −37‎ →‎Process parameters for the standard recipes on the 6" LPCVD polySi furnaces:

curprev 09:4709:47, 12 August 2014‎ Mdyma talk contribs‎ 5,210 bytes +5‎ →‎Expected results when using the standard recipe on the 6" LPCVD polySi furnace:

curprev 14:3914:39, 23 June 2014‎ Mdyma talk contribs‎ 5,205 bytes +1‎ →‎Process parameters for the standard recipes on the 6" LPCVD polySi furnaces:

curprev 15:2315:23, 14 May 2014‎ Pevo talk contribs‎ 5,204 bytes −155‎ →‎Expected results when using the standard recipe on the 6" LPCVD polySi furnace:
curprev 15:2315:23, 14 May 2014‎ Pevo talk contribs‎ 5,359 bytes −118‎ →‎Process parameters for the standard recipes on the 6" LPCVD polySi furnaces:
curprev 15:1915:19, 14 May 2014‎ Pevo talk contribs‎ 5,477 bytes −122‎ →‎Process parameters for the standard recipes on the 6" LPCVD polySi furnaces:

curprev 10:2410:24, 17 December 2013‎ Pevo talk contribs‎ 5,599 bytes +85‎ No edit summary
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curprev 15:4915:49, 11 December 2013‎ Pevo talk contribs‎ 5,255 bytes +2,123‎ →‎Process parameters for the standard recipes on the 6" LPCVD polySi furnaces:
curprev 15:4815:48, 11 December 2013‎ Pevo talk contribs‎ 3,132 bytes +890‎ →‎Expected results when using the standard recipes on the 6" polysilicon furnace:
curprev 15:4515:45, 11 December 2013‎ Pevo talk contribs‎ 2,242 bytes +748‎ →‎Standard recipes on the 6" polysilicon furnace (this recipe is being watched in the in the quality assurance program):

curprev 15:4515:45, 11 December 2013‎ Pevo talk contribs‎ 1,494 bytes +1,494‎ Created page with " ==Standard recipes on the 6" polysilicon furnace (this recipe is being watched in the in the quality assurance program):== {| border="1" cellspacing="2" cellpadding="1" colsp..."

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