Specific Process Knowledge/Thin film deposition/Deposition of Silicon/Si evaporation in E-beam evaporator Temescal-2: Revision history

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7 February 2024

  • curprev 16:2316:23, 7 February 2024Eves talk contribs 4,383 bytes +4,383 Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2023</b> by <b>Patama Pholprasit</b> and <b>Evgeniy Shkondin, DTU Nanolab</b>.<br></i> =Evaporation of Si in Temescal-2= This page describes evaporation method of Si in Temescal (10-pocket). Silicon is easily evaporated using e-beam..."