Specific Process Knowledge/Lithography/EBeamLithography/JEOL Processes: Revision history

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23 February 2024

  • curprev 10:1410:14, 23 February 2024‎ Thope talk contribs‎ 383 bytes +383‎ Created page with "<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px =Large area circle arrays= Arrays of circles can naturally be exposed by exposing a pattern that consists of circles. For large areas this can however be very time consuming and pattern files can become very large. Hence, in this work we investigate a different approach."
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