Specific Process Knowledge/Back-end processing/FlexScribe: Difference between revisions
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The Cleaver: FlexScribe is designed for cleaving large wafers into smaller pieces from the frontside. Hence it will leave particles on the frontside of the sample. It works by running a "pizza wheel" over the sample and then breaking it in two by using a pair of pliers. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: Flex Scribe should always be placed inside Fume hood 5. | '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Back-end_processing/FlexScribe click here]''' | ||
The Cleaver: FlexScribe is a scriber designed for cleaving/scribing large wafers into smaller pieces from the frontside. Hence it will leave particles on the frontside of the sample. It works by running a "pizza wheel" over the sample and then breaking it in two by using a pair of pliers. | |||
The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: Flex Scribe should always be placed inside Fume hood 5. | |||
[[File:flexscribe.JPG|400px]] | [[File:flexscribe.JPG|400px]] | ||
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*Sapphire | *Sapphire | ||
The Flex Scribe can cleave samples from | The Flex Scribe can cleave samples from 150mm down to ~10mm, please contact wetchemistry group for more information | ||
DTU-Nanolab has 3 different types of Cleavers see the Labadviser pages for the '''[http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Back-end_processing/FlipScribe FlipScribe]''' and the '''[http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Back-end_processing/LatticeAxe LatticeAxe]''' for more information. | |||
Revision as of 08:59, 21 April 2020
Feedback to this page: click here
The Cleaver: FlexScribe is a scriber designed for cleaving/scribing large wafers into smaller pieces from the frontside. Hence it will leave particles on the frontside of the sample. It works by running a "pizza wheel" over the sample and then breaking it in two by using a pair of pliers.
The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: Flex Scribe should always be placed inside Fume hood 5.
Approved Materials:
- Si
- Quartz
- Pyrex (Borofloat 33)
- GaAs
- InP
- Sapphire
The Flex Scribe can cleave samples from 150mm down to ~10mm, please contact wetchemistry group for more information
DTU-Nanolab has 3 different types of Cleavers see the Labadviser pages for the FlipScribe and the LatticeAxe for more information.