November 2019 Survey

Survey introduction

The November 2019 survey was the 19th survey carried out using a format where individual cleanroom users were asked about their view on various parts of using DTU Nanolab's facilities and in particular the cleanroom facilities.

The questionnaire was send to 74 registered users (based on the logging of cleanroom use with more that 10 hours usage/booking) unfortunately 3 of the e-mail adresses were obsolete and thus the mails bounced, which brought the total number of potential answers to 71. In total an answer fraction of 27%.

This page deals with the comments given as part of the questionnaire. DTU Nanolab values this feedback highly.

Comments

The comments appear here as they were written in the feedback field of the questionnaire. In a few cases they have been anonymized or the worst spelling mistakes corrected.

Comment 1

I would have put vs on performance too but the PECVD malfunctioned and broke my samples just last week :P Btw no one was really responsible for that, and I'm very satisfied in general.

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Comment 2

DTU Nanolab provides well-equipped cleanroom facilities with a highly skilled staff. However, recently a number of instruments have been out of order for extended periods of time (Wordentec, MVD, Disco Saw - Pyrex), which makes planning very difficult, since there are no alternative processes in place for e.g. MVD and wafer dicing. Furthermore, the mail-notification system refuses to send mails to my designated info mail-address (cleanroom@selmadiagnostics.com) despite several attempts to rectify it.

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Comment 3

It is not a real complaint, but many instruments are very busy. I'm only a user of photolithography, hard etching and Temescal. For example, the ICP metal can sometimes be booked 24/7, and Temescal is also very popular.

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Comment 4

Chemicals trolleys are sometimes parked in front of fire extinguishers or other wild places. I suggest to mark on the floor where parking is permitted.

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Comment 5

I haven't used many machines yet to have a specific opinion on their availability or performance.

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