Nov 2015 Survey

Survey introduction

The November 2015 survey was the 13th survey carried out using a format where individual cleanroom users were asked about their view on various parts of using DTU Danchip's facilities and in particular the cleanroom facilities.

The questionnaire was send to 378 registered users (based on the logging of cleanroom use) unfortunately 11 of the e-mail adresses was obsolete and thus the mails bounced, which brought the total number of potential answers to 362 . In total 64 persons answered the questionnaire which means an answer fraction of 17%.

This page deals with the comments given as part of the questionnaire. Danchip values this feedback highly.

Comments

The comments appear here as they were written in the feedback field of the questionnaire. In a few cases they have been anonymized or the worst spelling mistakes corrected.

Comment 1

In the last months is really complicated to have time for using the equipment. It is always busy and full booking in working hours.

Action: No Action
With more and more users there is more and more activity on the tools. At the moment it is advised to utilize hours outside normal working hours. If there are tools which are overbooked for months please let us know on an individual tool basis.
On a monthly basis we do check which tools constitute a bottleneck and try to accommodate.

Comment 2

Some of equipments are over booked and administration are not checking who has over booked.

Action: We are implementing new functionality in LabManager to police the booking rules
Overbooking is problematic and an area which deserves more attention from Danchip's side. Utilization of equipment is important especially with respect to the record high usage of the cleanroom in 2015. We are taking steps to have the booking rules enforeced by LabManager, however if you spot situations where there are overbookings, please let us know.

Comment 3

More courses where you can make stuff!

Action: No action
We do not have anything planned, due to limited resources, but we do enjoy it ourselves.

Comment 4

Some pieces of equipment are booked many weeks in advance, and some users are not good at sending out cancellation notices, so other users can step in and take up processing.

Action: No immediate action
This is unfortunate. We are working on a couple of ideas to help minimize the issue.

Comment 5

We totally understand that some machines fail due to complicated reasons. However, we wish Danchip could try to provide as much information to the customers as possible, instead of keep postponing the expected ready date without saying much. So the customers can arrange their work in a better way.

Action: No immediate action
We try to supply relevant information about the progress of the repair process. The expected ready date reflects our best possible guess of when the tool is ready, so we try our best to update this.

Comment 6

Perhaps investing in an Advanced Silicon/Oxide Etcher, which is dirty, i.e. you will allow metals and stuff inside.

Action: Technology scouting
These applications are where we use RIE2. If you have any specific wishes with regards to processes please get in touch with the Dry Etch team. With that said we know that RIE2 will not last forever, and we are constantly looking into a replacement for it.

Comment 7

Jeg synes at der er et stort problem med, at det er kutyme at sende mails ud til hele Cleanroomuser-list, hver gang man bliver tidligere færdig med eller sletter en booking. For mig at se er det direkte spam, idet hundredevis af mennesker modtager hver mail, og beskeden måske kun er relevant for en håndfuld af dem. Antallet af den slags mails er meget højt. For at bevare min forstand har jeg opsat en indbakke-regel, som automatisk sætter en mail som læst, hvis den kun er sendt til Cleanroomuser-list. Det betyder bare, at den sjældne relevante mail, typisk vigtige mails fra DanChip, nemt bliver overset, og det vil være min påstand, at mange andre også må overse de vigtige mails, i det hav af irrelevante mails (måske >99%) der bliver sendt til den mailing liste. Jeg synes at I allerede har lavet en stor forbedring ved at man på LabManager kan vælge, hvilke maskiner man ønsker at modtage mails fra på LabManager. Er det ikke muligt at give folk samme mulighed for at sende "I deleted my booking"-mails via LabManager, og derved kun ramme de, som har har udtrykt interesse for den pågældende maskine, og derved reservere Cleanroomuser-list til de vigtige mails, som faktisk har generel relevans?.

Action: Look into possible realization
This is a good suggestion, we will look into the possibilities. We agree that important mails can get lost in the stream of mails.

Comment 8

Spin Coater: Manual All Resist is heavily used, with real no alternative options, and appears that it would be cheap to purchase an extra of these machines - also in order to have an alternative in case of down-time.

Action: Looking into the possibility

Comment 9

I appreciate the help provided by the Thinfilm Group (Henrik Nielsen) in getting the Alcatel up and running - crucial to my research. This Winter we are aiming at getting the SERS chip to a clinical trial, including children with cystic fibrosis at Rigshospitalet. Again, it will be crucial for this work to have the Alcatel running stable.

Action: The Alcatel is back
The Alcatel is usually a solid tool, there was a defect on a controller but it is now back online with refurbished pumps and new controller so you should be good to go.

Comment 10

I still do not know why I have been charged, since my project number is internal at DTU

Action: No Action
You have probably not been charged, most likely you have received a specification of how much you have used Danchip.

Comment 11

I found beakers for HF in III-V room is uncomfortable to use. They are sliding out of hands and easy to drop, Taking in account danger of HF I am not unsatisfied with equipment. SEM Zeiss is very busy. New Zeiss is already two weeks used by Danchip but released for public. Taking in account frequency of problems with Zeiss Supra I am satisfied with performance of equipment. Also, to reduce time of answer for request of training I would like to suggest automatisation of training among Danchip staff. For every device there is a group of responsibles. I suggest to create a web form for training request. This will allow to direct request to responsible group. Moreover, I suggest to have to have a cycle queue of group members, so request will be directed to first in queue automatically. One more. As ever Danchip staff is responsible for specific group of devices, I suggest to implement badges (for example hand bands). So I can be sure, that I am asking right person. It is also good to have similar marking for Danchip staff in CR list, so one can be sure that responsible can be found in CR. Also, it will good to have list of people in CR accessible online, so one can check the person and mark oneself as out of cleanroom, in case one forgot to swipe out or didn't notice that swipe hadn't worked.

Action: Individual followup as needed
Please take contact to the wet chemistry group if you feel unsafe in the III-V lab when handling HF. Regarding release of tools we do try to get them in the hands of users as soon as at all possible, but we do need to make sure the tool is working. Regarding the remaining comments, they seem slightly complicated and are not our preferred way of working

Comment 12

Spin Track 1 is most of the time out of use and or it crashes after few wafers, and this is, as customer, quite annoying.Furnaces sometimes are out of use for quite a lot of time (B2 for instance) In this moment there are 9 machines out of use 11 in Limited use 3 in service.

Action:
Spin Track 1 does crash quite often, it will usually require reset by Danchip staff. We are looking into ways of solving this. Some tools will break from time to time, that is unavoidable in a multi-user cleanroom with more than 100 tools and 250 users. We do monitor the average machine uptime which consistently is above 85%.

Comment 13

I had a hard town finding proper gowns that fit with shoes that fit.

Action: No immediate action
Please contact Danchip staff, it is not entirely clear what the issue is.

Comment 14

Very helpful and reactive staff. Equipment and process performance not always reliable, resulting in a number of different quality issues over time.

Action: No immediate action
Thanks for the comment regarding staff. Regarding quality, we would appreciate feedback on the specific issues.

Comment 15

For some I am not satisfied with equipment availability: Pegasus, alcatel, wordentech, SEM ZEISS. I am not satisfied with performance of equipment: Pegasus, wordentech

Action: No immediate action
You are mentioning a slew of our most popular tools, and while we agree that they are heavily booked, most of the time it is possible to find slots if you plan ahead or work outside normal working hours.

Comment 16

Thanks for a great working environment!

Action: No action
Thank you, you are welcome.

Comment 17

I acknowledge that Danchip puts in a lot of hard work in running the facility and it has constantly been growing with new equipment. It was also a big factor for my decision to do a PhD at DTU. However, there has been a lot of downtime on certain machines and that is a big bottleneck for many projects. For me, I have milestones set with an industry and they have grown really impatient due to the delay in delivery of results. We have been 6-9 months behind our set deadlines. For example, the IBSD machine has been down for long periods of time. Most of the times the reason has been failure of parts, and the frequency of failing has been quite high too. I respect Pete and Martin for having working hard to get back the machines on time. However, when there is a part to be replaced, there is a long wait time. I know it has to do with the delivery of parts from companies. But is there a way in which you could have some agreement / contract with them? You guys know your job well and are doing a great job in running the facility. I hope it can be even better.

Action: Unfortunately no immediate action
We are not ourselves satisfied with the uptime of the IBSD. At this point in time we have very little leverage on the specific company.

Comment 18

My experiencw is that staff personel varies from very helpful and approachable to sometimes borderlining rude and indifferent. Mostly the latter fortunately. Information level is very timely and resolving issues with equipment usually fast.

Action: No immediate action
We do not wish to leave a rude impression, please get back to us with more details.

Comment 19

Reply or feedback from some Danchip staffs is qutie slow.

Action: No immediate action
The comment is rather general. Please help with more information regarding specific cases.

Comment 20

Lithography has been dreadful this month. Used HMDS2 on a 24 wafer batch and all resist fell off upon development. Then SSE spinner broke down and has basically been down 3 weeks...Also, Pegasus is overbooked and has been for a long time.

Action: Gamma coater to replace SSE
Please note that the valve on the HMDS2 is interlocked with LabManger, so that eventhough the process may appear to start, no HMDS will be deposited if you are not logged on. The SSE spinner is getting old and we are replacing it with a Suss Gamma coater in a short while. The overbooking of the Pegasus is an issue we are keeping an eye on.

Comment 21

PECVD2 is always with particles which makes device fabrication failed at this step. EVG-NIL is always out of use. In addition, for E-beam writer, it is better to train normal users to load the cassette. It will make the use of the machine more efficiently.

Action: EVG NIL will be replaced
The NIL is nearing its end-of-life, and we have ordered a new tool for bonding and another for imprinting, which we expect online in the second half of 2016. The particle generation is covered by our QC process, so we suggest you check the QC levels and perhaps run a monitor wafer prior to your component wafer. Regarding the E-Beam writer loading, we are very careful with this very expensive and fragile tool, so at this point we are not allowing users to load samples.

Comment 22

I work in the old III-V yellow room, and this room need a upgrade.

Action: Will happen 2016
The fumehood and lithographic activities will be moved from the III-V lab to the ISO4 litho rooms and the ballroom D-3.

Comment 23

It would be really nice if you switched back to the old gloves, they were perfect. The new ones are uncomfortable, hard to put on, and in general annoying.

Action: New gloves
We have now gotten new gloves which we find are even better than the older ones.

Comment 24

Generally quite good. room is clean. Really helpful technicians. there are some small things I think we can improve. Some small tools like conductive taps and holders are sometimes not available. Hope we can buy from you or have a cabinet for these stuff. Coffee machine does not work, have no cups for water.

Action: No immediate action
If there are some general supplies you are missing please get in touch with the SEM responsible. If the coffee machine is not working, you are welcome to use the one in the lunch room.