May 2018 Survey

Survey introduction

The May 2018 survey was the 18th survey carried out using a format where individual cleanroom users were asked about their view on various parts of using DTU Danchip's facilities and in particular the cleanroom facilities.

The questionnaire was send to 78 registered users (based on the logging of cleanroom use with more that 10 hours usage/booking) unfortunately 4 of the e-mail adresses were obsolete and thus the mails bounced, which brought the total number of potential answers to 74 . In total an answer fraction of 27%.

This page deals with the comments given as part of the questionnaire. Danchip values this feedback highly.

Comments

The comments appear here as they were written in the feedback field of the questionnaire. In a few cases they have been anonymized or the worst spelling mistakes corrected.

Comment 1

I would like to suggest that frequently faulty equipments should be fixed with a solution that can last for a reasonable time. (such as PECVD4)

Action: No action

We are always trying our best to keep equipment up and running. However, some repairs can be quite tricky.

Comment 2

Unfortunately, we do not have a metal-free fume hood to manually treat samples which are sensitive to metal contamination.

Action: No action.

Yes, we do not have any fume hoods where metals are not allowed. However, it is possible to contact either the Customer Support or Wet Chemistry group who might be able to give you a dedicated beaker for rinsing your samples. They can also provide general guidance with your process.

Comment 3

Instability in III-V ICP and Supra2 are annoying. It will good to have room or space for people who need to wait a process for more than 10 minutes, but don't want to leave the cleanroom. Ussually they occupy closest free PC and chair.

Action: No action

We believe that we have solved the problems with the III-V ICP and the Supra 2.
We do not have sufficient space for a dedicated waiting space. If people are blocking the work space, it is perfectly OK to ask them to leave.

Comment 4

The very unsatisfied has roots in the delay with gasses where the month by month delay ended up lasting 6 months

Action: More gas spare parts in stock.

The gas down time in the spring of 2018 was very unacceptable. It was caused by a major etch-through of a corrosive gas line and subsequent problems in sourcing spare parts and gas welders. We now have more spare parts in stock, but it may still be problematic to get hold of gas welders with short notice.