May 2013 Survey
Survey introduction
The May 2013 survey was the ninth survey carried out using a format where individual cleanroom users were asked about their view on various parts of using DTU Danchip's facilities and in particular the cleanroom facilities.
The questionaire was send to 252 registered users (based on the logging of cleanroom use) unfortunately 5 of the e-mail adresses was obsolete and thus the mails bounced, which brought the total number of potential answers to 247 . In total 49 persons answered the questionaire which means an answer fraction of 19% regardless of whether or not the bounces should be included in the total.
This page deals with the comments given as part of the questionaire. Danchip values this feedback highly.
Comments
The comments appear here as they were written in the feedback field of the questionaire. In a few cases they have been anonymized or the worst spelling mistakes corrected.
Comment 1
The best SEM (Zeiss) is always overbooked and it is quite difficult to find a time slot if not planning the inspection in advance. When are the users of III-V semiconductors getting the new aligner? This event was mentioned in the last meeting with Danchip.
Action:We are aware that the new Zeiss SEM is the most popular of the three field emission SEM's in the lab. However, seen as a whole we do not have a general capacity problem in the SEM area. For many of the tasks all three SEM's are fully capable. Therefore, please try to spread the use on all three tools if possible.
Comment 2
Claus is the man
Action: Patting Claus on the back
Comment 3
Keep up the good work!
Action: Smiles all around
Thanks.
Comment 4
I find it a waste of both time and chemicals to clean wafers before usage, since they are already clean and vacuum packed when they arrive. If 3rd parties wish for them to be cleaner, then let those person perform the extra cleaning process and not everyone who needs a wafer now and then.. Also: A lot of people don't use the logs. I have used the SEM (Zeiss) frequently and some days its booked from 8-19, but only one or two persons have logged it when I arrive after 19
Action:First of all: The main reason for the cleaning requirement is protection of the equipment. It may seem as a waste of time to clean wafers which already seem to be clean, but even very small traces of e.g. metals or alkali ions on a wafer may contaminate the glassware of a furnace and destroy e.g. the quality of the silicon oxide grown in the furnace. Actually, compared to similar laboratories elsewhere we have very relaxed rules on the cleaning requriements. Unfortunately, recently we realized that the rules probably were too relaxed as we had severe problems with the breakdown voltage of the silicon oxide grown in three of four furnaces. We have simply gone back to the rules we used to have.
Comment 5
It was a very educative and interesting experience. All the staff, the conditions, as well as, the cleanroom conditions were excellent contributing in a better understanding of the experiment.
Action:
Comment 6
Some key equipment items are often out of use. e.g. MVD
Action:
Comment 7
EVG-NIL and obducat have been down frequently. Pressure gauge problem in the III-V RIE makes me couldn't leave the machine all day. There're 3 SEMs but people only want to use Zeiss. That includes myself too because I could obtain the best image using Zeiss. However, if the other 2 can get the same quality image as in Zeiss, it'd help increase the equipment availability a lot.
Action:Regarding the SEM-part: see answer to comment 1. The three SEM's are different and we can not change that. The quality on each tool will depend on your requirements, the type of sample you are investigating, and your skills. However when possible please spread your usage on all three tools.
Comment 8
Availability of Equipment ... depends on the equipment! SEM-Zeiss is usually heavely booked and quick investigation of an etching result to proceed with further steps is impossible during normal work hours. A shoehorn placed next to the "take the shoes off line" would be helpfull. ;-) A better place for the wardrobe would be nice. Perhabs a little one in the corner next to the "take the shoes off line". .
Action:Regarding the SEM-part: Please see comment 1 and 7.
Comment 9
why are rules more and more restrictive, it used to be possible to show cleanroom to visitors, if they have been accomplished and not allowed to touch anything.
Action:
Comment 10
We had some availability issues with the IBE deposition recently. I'm am very satisfied otherwise and would like to use this opportunity to thank you for your great work again.
Action:
Comment 11
There is way to many useless mails about equipment not being used any more. If this could be changed so that you via the labmanager homepage were able to say what equipment you were interested in. And then only receive mails about those, that would be great.
Action:
We totally agree - the information from email is spamming most people and hardly reaching the people that need it. A lot could be done in this area. The first step will be to only send mails from the system to trained users - and to the users who choose to receive info even though they are not trained.
Comment 12
Some equipment, especially for III-V materials doesn't work from time to time and is not always stable.
Action:
Comment 13
Muligheden for at sende sine skiver ud skulle måske benyttes mere hvis det udstyr vi har her ikke kan løse opgaven. Det skal siges at Danchips personale i udpræget grad er hjælpsomt næsten så meget at man bliver mistænksom :). Det er godt at arbejde et sted hvor man bliver mødt med smil og åbne arme samt hjælp!
Action: Smil
Det er en god pointe at der findes andre steder i verden der har udstyr hvis vores enten ikke virker eller vi ikke har processen. Lige nu er der ikke noget system i til at danne overblik over procesalternativer udenfor DTU, men det kunne være at Process2share wikien vil kunne bruges til det.
Tak for de meget rosende ord, det glæder os oprigtigt når vi har hjulpet brugere.
Comment 14
As a relatively new clean room user, I find that I must frequently search for materials within the clean room - such as tweezers, manual scribing materials, wafer boxes - myself. Thus I think it would be quite useful to have a general inventory that lists the location of most of these aforementioned materials. Cheers!
Action:
Comment 15
It would be a benefit with two cleanroom mailing lists. One for all the status change of equipments and users saying they are done early, and one for general and important information from Danchip. With the present mailing list, most of the information you send out, drowns in all the other often not relevant emails. Also, Danchip staff is often slow at answering emails. Especially when writing to the training@danchip.dtu.dk. From what I have heard, many in staff do not like this email and prefer you write directly to them. This should be standardised to only one system for machine training, to not waste time when writing to an email often not answered.
Action:
We recognize the problem with too many emails, but in our view the solution is not more lists. What we will do is send information more directly to the users that need it (see also answer to Comment 11).
Regarding mails send to training. I (Anders) am a bit puzzled about the critique, not only from you but from a number of people regarding the training mailbox. What I see is a system where we have a chance of catching a large number of requests into one simple address. In that way the users of the lab do not need to know what each and everyone at Danchip is doing but we can help guide along the way. When I look through the responses we are usually faster than the stated goal of 2 days, but we are keeping an eye out for it, and intend in the fall to be able to measure the responsetime to training emails.
One of the weaknesses in Danchip's very open structure is that experienced users have a very direct way to approach individual Danchip staff to get a particular service. This ranges from 'cutting the line' to get faster training, to getting jobs done faster on particular tools and all the way to having their key tools repaired before another tool. This is a problem we cannot ignore, but we are trying to minimize the effect by using the training post box to give newcomers a decent chance not to be pushed back.
Comment 16
Jeg oplever ofte at jeg ikke får svar på emails sendt til de overordnede mailadresser ("training", "photolith" etc.). Det er ret frustrerende at man aldrig rigtig ved om ens mail kommer det rigtige sted hen. ofte ved man godt hvem det er man skal i kontakt med, og det går altid hurtigere at tage direkte kontakt til den pågældende danchipmedarbejder. På den måde er de "samlede" mailadresser kun til besvær :(
Action:
Du bør altid få en kvittering fra training og de andre fællespostkasser fra forsiden af LabAdviser. Hvis du ikke har fået sådan en er mailen ikke blevet leveret til os.
Angående kommentaren om direkte kontakt se venligst bemærkningerne under kommentar 15. Ja - det er som regel hurtigere at tage direkte kontakt, men det at du bliver betjent hurtigere vil være på bekostning af mindre erfarne brugere. Dette er et dilemma som Danchip er opmærksom på, vi ser meget godt i åbenheden og mulighedn for at brugere kan tage direkte kontakt til vores folk. Samtidig ved vi også at det betyder at vi skal være særligt opmærksomme på ikke at erfarne brugere får en urimelig stor fordel sammenlignet med nye brugere, dette er selvfølgelig meget lettere jo færre indgange der er til Danchip.
Comment 17
Only thing needed to be improved is mail-response time.
Action: Please complain directly when response time is substantially above 2 days for joint mailboxes
We have a goal of answering emails send to the joint mailboxes e.g. Training (boxes are on the front of LabAdviser) within two days. If a mail send to one of these boxes take substantially longer, feel free to mail a complaint to ajoe@danchip.dtu.dk or thes@danchip.dtu.dk, and we will investigate each individual case.