May 2012 Survey

Survey introduction

The May 2012 survey was the seventh survey carried out using a format where individual cleanroom users were asked about their view on various parts of using DTU Danchip's facilities and in particular the cleanroom facilities.
The questionaire was send to 181 registered users (based on the logging of cleanroom use) unfortunately 4 of the e-mail adresses was obsolete and thus the mails bounced, which brought the total number of potential answers to 177 . In total 42 persons answered the questionaire which means an answer fraction of 24% regardless of whether or not the bounces should be included in the total.
This page deals with the comments given as part of the questionaire. Danchip values this feedback highly.

Comments

The comments appear here as they were written in the feedback field of the questionaire. In a few cases they have been anonymized or the worst spelling mistakes corrected.

Comment 1

LabAdviser is often outdated, especially equipment lists.

Action: revising the LabAdviser pages
Danchip is very happy about the use of LabAdviser and sees the platform as an essential knowledgesharing platform for the present as well as the future.

Comment 2

Lesker Sputter system has been found often extensively booked for many full days in a row.

Action: No action
Indeed the Lesker has been heavily booked in this spring. However, due to the complexity of depositions and metal availability of that tool it does not seem fair to limit the time users can book it. We are keeping an eye on tools to see if they are too heavily booked but so far the variations on the Lesker does not lead us to further activity.

Comment 3

The labmanager change-over such have been postponed to a point where the software was better tested. Else wise I'm very satisfied with Danchip.

Action: Yes, there were many problems with the release. We will do what we can can to avoid similar problems with future upgrades.

Comment 4

Could be better to supply accessories like wafer boxes in the changing room more regularly.

Action:

Comment 5

It happens quite often when equipment that I need to use is down. Performance of III-V Spinner, III-V Aligner,III-V ICP is not always good.

Action: The photolith group has performed a major overhaul of the III-V aligner, so it should run a little better now. However, it is still an old tool which is prone to give problems. We are also planning to include the III-V spinner and aligner in the weekly check procedure, which is already being performed on other photolith tools. Feedback from customers on specific errors is also important to us. If you should experience more issues with the III-V aligner, the Photolith group would be very interested to hear about them.

Comment 6

I very much appreciate the friendliness and positive attitude of the Danchip personal, thank you! These small points could be improved: - It would be nice if one could start using a machine in LabManager by clicking on the booking again - It happened quite often to me that the wafer and 250Coven excel-files could only be used in read-only mode

Action: Clicking on the booking to start equipment will soon be available again. And yes, opening excel sheets you need to edit in read-only mode is anoying; everybody must remember to close down shared files after use until we have a better solution for the logbooks.

Comment 7

There are more dryer machines required in old part cleanroom. For example, lithography cleanroom 3. It's better to have a guide map in labmanager for easier finding some machines location.

Action: A newly refurbished spinner rinser dryer will be installed in Ccleanroom 3 and should be operational by the end of September. We are working on a cleanroom map.

Comment 8

Had some issues with the new labmanager, but it has been solved now.

Action:
As with Comment 3, we will try to avoid similar problems with future upgrades.

Comment 9

The PECVD1 machine has been something wrong for a long time. Since it is too old, is it possible to consider to by a new one? Or put more than one PECVD system as clean machine?

Action:

Comment 10

I can always get help, and equipment is usually not out of function for very long.

Action:
Thank you very much for the praise.

Comment 11

Der går typisk for lang tid fra man kontakter Danchip (eks. træning, processflow etc) og før man får svar.Labadviser burde blive ajourført noget oftere, hvis det skal kunne bruges som en ordentlig hjælp til fabrikationen.

Action: No action
We strive to respond within 2 days to requsts comming to training@danchip.dtu.dk and process_flow@danchip.dtu.dk. It is unfortunate that in some situations we have not been able to keep these response times but it is in our opinion a rare occurence.

Comment 12

Especially the employees must be congratulated on an excellent level of cooperation and guidance.

Action:
Thank you very much it is nice to get acknowledged like this

Comment 13

I appreciate the accommodating attitude of the DANCHIP staff.

Action:
Thank you.

Comment 14

Make it easier to come in contact with staff regarding equipment training.

Action: No action
We rely heavily on training@danchip.dtu.dk as the point of contact for training. In most cases it gives us the opportunity to select among several trainers which means we can get to training sessions faster.
One thuing which would help us a lot is if the user takes some care in providing more context information when requesting training. It really helps us to know: what process flow is this related to?, are wafers available?, is special resist available?, do you have the photomask?, are you only requesting tool training or is it a full process, do you have any experience with similar tools?.
It may sound odd but in many cases you should not expect us to know very much about your process and processing, there more information you can provide the better and faster can we help with the training.

Comment 15

The new LabManager is nice, but I mis a couple of old functions, such as start machine from booking and change time interval for machine if you forget to log on or off when you use it.

Action:
Starting from booking will be possible again soon. Changing the time interval has been disabled for the following reason:
In the new LabManager we will collect all the services that we provide and we invoice (access, usage, wafers, rent of space, etc.) Since not all services are time based (i.e. wafers) we have chosen to have the more generic field "amount" as a measure of the provided service. Go to "Orders", you can click on "change" to edit: The "amount" field is a decimal field, so 2h 30min is registered as 2,5.

Comment 16

If equipment is down, normally you have to ask if you want to know, when it is expected to be up again. Even if you are not sure, when exactly the equipment will be operational again, it is nice to set a 2 sentence update on labManager. 1. Description of the problem 2. How it is going to be solved, if external help e.g. shipping of supplies is needed, time estimate (best - worst). Thanks to all staff members, that are really helpfull and very open to questions!

Action:

Comment 17

The helpfullness of the staff is excellent, also in training (my student came to me praising the training, that she get in the last two weeks). Sometimes the KS aligners are overbooked. The Plasma Asher (in the lithography room) could also have a booking calender.

Action: If the KS aligner is fully booked, you can always use the EVG aligner in the new yellow room. It is also a nice aligner with the same capabilities as the KS aligner plus more, such as automatic alignment. In the new yellow room you will also find an automatic developer bench with automatic mixing of AZ351B and DI water, circulation pump and elevator. Just put the wafers in the tank, press Start, and have your wafer developed.
We are a little reluctant in making the asher bookable. The acetone stripping baths are also not bookable.