LabAdviser/Courses/TPT Lithography

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DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipment at DTU Nanolab.

You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom).


Lithography Tool Package Training
Signing up for the course

The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Lithography".

  • Log into DTU Learn here: DTU Learn
  • Select the menu "Discover"
  • Search for "Nanolab"

Select the course "DTU Nanolab TPT: Lithography"

  • Press "Enroll in Course"
  • You have now signed up for the course.
  • Go to the course page in DTU Learn and choose "Course Content" and "Content"
  • Watch the lecture videos, read the learning material, and complete all the quizzes.
Learning Objectives

Learn about the fundamentals of lithographic processing in a cleanroom:

  • Coating
  • Exposure
  • Development
  • Post-processing


Extra material for preparations and further information

Extra literature


Lecture videos

  • No extra videos


Lecture slides

  • No extra slides



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