2013 Usage Top list
Tool usage registered in LabManager. For tools which are charged by booking, the amount of time is the booked time. For other tools it is the registered time.
Tool usage is part of Danchip's decision making processes for maintenance allocation as well as new acquisitions but by no means the only parameter.
Rank 2013 | Tool Name | Usage (hours) |
1 | SEM - Zeiss | 2114 |
2 | Resist Pyrolysis Furnace | 1507 |
3 | Black Magic PECVD (Carbon) | 1140 |
4 | Hotplate 4 (SU8) | 1113 |
5 | Electroplating-Ni | 1065 |
6 | DRIE Pegasus | 1042 |
7 | Hotplate 2 (SU8) | 1033 |
8 | XPS-ThermoScientific | 971 |
9 | Wordentec | 971 |
10 | E-Beam Writer 9500 | 913 |
11 | Furnace: Phosphor Drive-in (A3) | 898 |
12 | EVG NIL | 798 |
13 | Polymer Injection Molding | 793 |
14 | Furnace: Boron Drive-in and Pre-dep (A1) | 754 |
15 | BCB Curing Oven | 728 |
16 | Plasma Asher | 638 |
17 | Hotplate 3 (SU8) | 620 |
18 | Lift-off (4",6") | 592 |
19 | RIE2 | 587 |
20 | KS Aligner | 569 |
Internal Danchip sponsors not included in these totals: Process Develop, Maintenance, QC, Training