2010 Usage Top list

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Tool usage registered in LabManager. For tools which are charged by booking, the amount of time is the booked time. For other tools it is the registered time.
Tool usage is part of Danchip's decision making processes for maintenance allocation as well as new acquisitions but by no means the only parameter.

Rank 2010 Tool Name Usage (hours)
1 Hotplate 1(SU8) 1875
2 SEM-FEI 1342
3 EVG NIL 1321
4 III-V Dielectric Evaporator 1200
5 Hotplate 2(SU8) 1079
6 Wordentec 1040
7 SEM-LEO 990
8 Fumehood(KOH) 914
9 E-beam Writer 824
10 ASE 814
11 III-V RIE 727
12 KS Aligner 673
13 Furnace: Gate Oxid 654
14 RIE1 653
15 KOH3(4",6") 632
16 Dektak 8 585
17 Furnace: Bor Drive-in 573
18 2-Photon-Polymerization 536
19 Furnace: Phosphor Drive-in 515
20 RIE2 496

Internal Danchip sponsors not included in these totals: Process Develop, Maintenance, QC