2009 Usage Top list
Tool usage registered in LabManager. For tools which are charged by booking, the amount of time is the booked time. For other tools it is the registered time.
Tool usage is part of Danchip's decision making processes for maintenance allocation as well as new acquisitions but by no means the only parameter.
Rank 2009 | Tool Name | Usage (hours) |
1 | ASE | 1286 |
2 | SEM-FEI | 1061 |
3 | Wordentec | 1054 |
4 | SEM-LEO | 932 |
5 | KS Aligner | 735 |
6 | Furnace: Phosphor Drive-in | 663 |
7 | E-Beam Writer | 633 |
8 | Alcatel | 625 |
9 | Furnace: Anneal-bond(C3) | 600 |
10 | EVG NIL | 575 |
11 | RIE2 | 528 |
12 | Dektak 8 | 499 |
13 | Furnace: Bor Drive-in | 497 |
14 | MVD | 496 |
15 | III-V Dielectric Evaporator | 424 |
16 | Furnace: Noble | 415 |
17 | NanoMan(AFM) | 406 |
18 | Fumehood(KOH) | 397 |
19 | HMDS oven | 394 |
20 | Furnace: LPCVD Poly-Si | 388 |
Internal Danchip sponsors not included in these totals: Process Develop, Maintenance, QC