2009 Usage Top list

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Tool usage registered in LabManager. For tools which are charged by booking, the amount of time is the booked time. For other tools it is the registered time.
Tool usage is part of Danchip's decision making processes for maintenance allocation as well as new acquisitions but by no means the only parameter.

Rank 2009 Tool Name Usage (hours)
1 ASE 1286
2 SEM-FEI 1061
3 Wordentec 1054
4 SEM-LEO 932
5 KS Aligner 735
6 Furnace: Phosphor Drive-in 663
7 E-Beam Writer 633
8 Alcatel 625
9 Furnace: Anneal-bond(C3) 600
10 EVG NIL 575
11 RIE2 528
12 Dektak 8 499
13 Furnace: Bor Drive-in 497
14 MVD 496
15 III-V Dielectric Evaporator 424
16 Furnace: Noble 415
17 NanoMan(AFM) 406
18 Fumehood(KOH) 397
19 HMDS oven 394
20 Furnace: LPCVD Poly-Si 388

Internal Danchip sponsors not included in these totals: Process Develop, Maintenance, QC