Specific Process Knowledge/Lithography/EBeamLithography/JEOL Processes

From LabAdviser
Revision as of 09:14, 23 February 2024 by Thope (talk | contribs) (Created page with "<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px =Large area circle arrays= Arrays of circles can naturally be exposed by exposing a pattern that consists of circles. For large areas this can however be very time consuming and pattern files can become very large. Hence, in this work we investigate a different approach.")
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

THIS PAGE IS UNDER CONSTRUCTION


Large area circle arrays

Arrays of circles can naturally be exposed by exposing a pattern that consists of circles. For large areas this can however be very time consuming and pattern files can become very large. Hence, in this work we investigate a different approach.