Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2)

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THIS PAGE IS UNDER CONSTRUCTION

Unless otherwise stated, this page is written by DTU Nanolab internal

The furnace is being tested.

Flow440 recipe

Standby: N2 purge at 3 SLM and Standby temperature at 440C

LM-LOCK: Check LabManager

Wet stabilize: N2 through bubbler at 1.5 SLM for 20 min and then wait for operator to open the furnace

Open

Load samples

Close

Wet oxidation: Time: variable

Open: Automatically opens after the oxidation time reaches

Unload samples

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