Specific Process Knowledge/Characterization/Profiler/Apex software

Feedback to this page: click here

Apex software outside the cleanroom

The Tencor-KLA P17 stylus profiler comes with advanced data analysis software called APEX. We have an extra license for the software installed on a computer called NTCH-D0186 at Nanolab. The computer is currently located in the basement of building 346 in room 904. You will find it at the back of the room between the ALD and the PowderXRD. On the NTCH-D0186 desktop, you will find a shortcut to the APEX software. Access your data on the M drive, O drive or through files.dtu.dk and open it up with the software.

How to use the software

There are a number of tutorials on how to use APEX and a thorough help document which you will find when you open the program. If you learn something cool that you'd like to share, please let us know.

If APEX has automatically generated a surface from your line profiles of data, it is sometimes possible to view the underlying profiles by right-clicking on the surface and choosing Show Point style instead of Line style.

There are many ways and formats for saving data in this program - notice whether the format you have chosen will be useful for your later needs.

Best of luck and please contact thinfilm@dtu.dk if you have any questions.