Specific Process Knowledge/Characterization/Profiler/Apex software

From LabAdviser

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Apex software outside the cleanroom

The Tencor-KLA P17 stylus profiler comes with advanced data analysis software called APEX. We have an extra license for the software installed on a computer at Nanolab, which you can log on to from anywhere.

How to access the software

  • Connect to DTU's network by VPN unless you are physically at DTU.

For this you can use the service Cisco AnyConnect Secure Mobility Client. Connect to AIT Extra-VPN with your usual credentials.


  • Make a remote desktop connection to the computer NTCH-D0186.

For this you can use the Remote Desktop Connection app (at least on Windows). Again log on with your own credentials.


  • On the NTCH-D0186 desktop, you will find a shortcut to the APEX software
  • Access your data on the M drive, O drive or through files.dtu.dk and open it up with the software.

How to use the software

There are a number of tutorials on how to use APEX and a thorough help document which you will find when you open the program. If you learn something cool that you'd like to share, please let us know.


If APEX has automatically generated a surface from your line profiles of data, it is sometimes possible to view the underlying profiles by right-clicking on the surface and choosing Show Point style instead of Line style.


There are many ways and formats for saving data in this program - notice whether the format you have chosen will be useful for your later needs.

Best of luck and please contact thinfilm@dtu.dk if you have any questions.

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