Specific Process Knowledge/Characterization/Profiler/Apex software

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Apex software outside the cleanroom

The Tencor-KLA P17 stylus profiler comes with advanced data analysis software called APEX. We have an extra license for the software installed on a computer at Nanolab, which you can log on to from anywhere.

To access the software, you have to connect to DTU's network by VPN unless you are physically at DTU. For this you can use the service Cisco AnyConnect Secure Mobility Client. Connect to AIT Extra-VPN with your usual credentials. Next you need to make a remote desktop connection to the computer NTCH-D0186. For this you can use the Remote Desktop Connection app (at least on Windows). Again log on with your own credentials. Once logged on, you will find a shortcut to the APEX software on the desktop. You can access your data on the M drive, O drive or through files.dtu.dk to load it into the software.

There are a number of tutorials on how to use APEX and a thorough help document which you will find when you open the program.

Best of luck and please contact thinfilm@dtu.dk if you have any questions.