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Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2)

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< Specific Process Knowledge‎ | Thermal Process‎ | Oxidation

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Flow440 recipe

Standby:N2 purge at 3 SLM and Standby temperature at 440C

LM-LOCK: Check LabManager

Wet stabilize: N2 through bubbler at 1.5 SLM, Time: 20 min, Wait for operator

Open

Load samples

Close

Wet oxidation: Time: variable

Open

Unload samples

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