Specific Process Knowledge/Characterization/Optical characterization/advanced ellipsometry

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Examples of advanced use of the ellipsometer

Dielectric function measurement of emerging semiconductors by Andrea Crovetto

Media:2016_11_ancro_ellipsometry_at_Danchip.pdf
Content:

  • Dielectric function determination of new thin-film semiconductors
    • Learning about their electronic properties
  • Phase analysis of ”non-ideal” thin films
  • Thickness mapping (for its own sake and for resistivity mapping)
  • All-optical determination of electrical properties of transparent conductive materials
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