Template:Maximus: AZ5214E

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Maximus can be used for spinning on 2", 4" and 6" substrates. Right now we only have few recipes for the standard thicknesses, but we are working at it. Please address you suggestions to Photolith. Team in case you have some special needs.

  • for 4" substrates 1.5µm resist use flow 1.5 4inch
  • for 6" substrates 1.5µm resist use flow 1.5 6inch

For the flow description read this document.

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