Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange

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**Comparison of processes before and after the change of showerhead in December 2014**
Process	Before			After
Process	Parameter change	Wafer ID	SEM images	Comment	Wafer ID	SEM images
rebe g4-14 black silicon recipe	S004592	Centre wafer		S004592	Centre wafer	File:S004 centre.jpg

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