2013 Usage Top list

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Tool usage registered in LabManager. For tools which are charged by booking, the amount of time is the booked time. For other tools it is the registered time.
Tool usage is part of Danchip's decision making processes for maintenance allocation as well as new acquisitions but by no means the only parameter.

Rank 2013 Tool Name Usage (hours)
1 SEM - Zeiss 2114
2 Resist Pyrolysis Furnace 1507
3 Black Magic PECVD (Carbon) 1140
4 Hotplate 4 (SU8) 1113
5 Electroplating-Ni 1065
6 DRIE Pegasus 1042
7 Hotplate 2 (SU8) 1033
8 XPS-ThermoScientific 971
9 Wordentec 971
10 E-Beam Writer 9500 913
11 Furnace: Phosphor Drive-in (A3) 898
12 EVG NIL 798
13 Polymer Injection Molding 793
14 Furnace: Boron Drive-in and Pre-dep (A1) 754
15 BCB Curing Oven 728
16 Plasma Asher 638
17 Hotplate 3 (SU8) 620
18 Lift-off (4",6") 592
19 RIE2 587
20 KS Aligner 569

Internal Danchip sponsors not included in these totals: Process Develop, Maintenance, QC, Training