Specific Process Knowledge/Lithography/UVExposure

Manual Spinner( Polymers)

The Manual Spinner(Polymers) is placed in fumehood in Cleanroom 3.

The Manual Spinner(Polymers), Opticoat SB20+, from SSE Sister Semiconductor Equipment, are dedicated for spinning of imprint polymers, e-beam resist in small batches, SU8 resist and other polymers with extra addictive like color, nano particles etc.

There are 2 hotplates with temperature range up to 250C, placed in the same fumehood, which can be used for baking before/after spinning.

The user manual(s), quality control procedure(s) and results and contact information can be found in LabManager: Equipment info in LabManager