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- 18:57, 20 December 2022 Eves talk contribs created page File:Eves recordings power Carbon 200W 3mTorr 20min 20221018.png (File uploaded with MsUpload)
- 18:57, 20 December 2022 Eves talk contribs uploaded File:Eves recordings power Carbon 200W 3mTorr 20min 20221018.png (File uploaded with MsUpload)
- 18:57, 20 December 2022 Eves talk contribs created page File:Eves recordings flow Carbon 200W 3mTorr 20min 20221018.png (File uploaded with MsUpload)
- 18:57, 20 December 2022 Eves talk contribs uploaded File:Eves recordings flow Carbon 200W 3mTorr 20min 20221018.png (File uploaded with MsUpload)
- 18:57, 20 December 2022 Eves talk contribs created page File:Eves GiXRD Carbon 200W 3mTorr 6000s 20221018.png (File uploaded with MsUpload)
- 18:57, 20 December 2022 Eves talk contribs uploaded File:Eves GiXRD Carbon 200W 3mTorr 6000s 20221018.png (File uploaded with MsUpload)
- 18:57, 20 December 2022 Eves talk contribs created page File:Eves deposition rate Carbon 200W 3mTorr 20min 20221018.png (File uploaded with MsUpload)
- 18:57, 20 December 2022 Eves talk contribs uploaded File:Eves deposition rate Carbon 200W 3mTorr 20min 20221018.png (File uploaded with MsUpload)
- 18:57, 20 December 2022 Eves talk contribs created page File:Eves XRR Carbon 200W 3mTorr 30min 20221018.png (File uploaded with MsUpload)
- 18:57, 20 December 2022 Eves talk contribs uploaded File:Eves XRR Carbon 200W 3mTorr 30min 20221018.png (File uploaded with MsUpload)
- 13:45, 19 December 2022 Jehan talk contribs created page November 2022 Survey (Created page with "Not available yet.")
- 11:24, 16 December 2022 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation/Pathlist (Created page with ";;*** Mask Exposure Peformance Test *** MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE CYCLIC CURRNT,DRIFT CYCLE 5M MASK01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE CYCLIC CURRNT,DRIFT CYCLE 5M ;;*** Direct Exposure Peformance Test *** DIRE00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE CYCLIC CURRNT CYCLE 5M DIRE01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE CYCLIC CURR...")
- 20:51, 15 December 2022 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Carbide/Deposition of SiC in Sputter-System Lesker (Created page with "We can deposit SiC by RF sputtering in Sputter-System (Lesker). A 2-inch target from gun 5 (RF) is used in the process. Since the material is dielectric we are using 60W power and the slow power ramp. The deposition rate is very slow (<b>0.0056 nm/s</b>), so the oxygen absorption during the process can be an issue. The fabrication and characterization described below were conducted in <b>2022 by Patama Pholprasit and Evgeniy Shkondin, DTU Nanolab</b>. The prepared sampl...")
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC thick rec fowpower 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC thick rec fowpower 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC thick rec flow 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC thick rec flow 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC thick rec dcbias 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC thick rec dcbias 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC structure model 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC structure model 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC refrindex 20220920.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC refrindex 20220920.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC abscoeff 20220920.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC abscoeff 20220920.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC thin XRR 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC thin XRR 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC thin rec pressure 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC thin rec pressure 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC thin rec fowpower 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC thin rec fowpower 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC thin rec flow 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC thin rec flow 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC thin rec dcbias 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC thin rec dcbias 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC thick XRR 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC thick XRR 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC thick rec pressure 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC thick rec pressure 20220919.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC Si 2p old Lesker thick 20221215.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC Si 2p old Lesker thick 20221215.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC old Lesker thin 2D 20221215.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC old Lesker thin 2D 20221215.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC old Lesker thick 2D 20221215.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC old Lesker thick 2D 20221215.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC O1s old Lesker thin 20221215.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC O1s old Lesker thin 20221215.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC O1s old Lesker thick 20221215.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs uploaded File:Eves SiC O1s old Lesker thick 20221215.png (File uploaded with MsUpload)
- 20:51, 15 December 2022 Eves talk contribs created page File:Eves SiC C1s old Lesker thin 20221215.png (File uploaded with MsUpload)
