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List of abbreviations:
- N
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- m
- This is a minor edit
- b
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- (±123)
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31 May 2024
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13:14 | Template:Author-jmli1 2 changes history −1 [Jmli (2×)] | |||
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13:14 (cur | prev) −11 Jmli talk contribs | ||||
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13:13 (cur | prev) +10 Jmli talk contribs | ||||
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11:49 | Specific Process Knowledge/Lithography/EBeamLithography/EBLsubstratePrep 4 changes history −203 [Thope (4×)] | |||
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11:49 (cur | prev) −316 Thope talk contribs (→DTU Nanolab supplied EBL resists) | ||||
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11:48 (cur | prev) +32 Thope talk contribs (→DTU Nanolab supplied EBL resists) | ||||
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11:47 (cur | prev) +11 Thope talk contribs (→DTU Nanolab supplied EBL resists) | ||||
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11:46 (cur | prev) +70 Thope talk contribs (→DTU Nanolab supplied EBL resists) | ||||
| N 11:45 | Specific Process Knowledge/Lithography/EBeamLithography/ma-N 2400 diffhist +680 Thope talk contribs (Created page with "=Spin coating= ma-N 2400 can be spin coated on LabSpin 2 and 3 using the CSAR/PMMA bowlset. A spin curve for ma-N 2400.05 is provided below. Process parameters are: *Date: May 31st 2024 *Coater: LabSpin 2 *Substrate: 2" Si *Acceleration: 1000 RPM/s *Time: 60 s *Baking temperature: 90C (setpoint at 100C) *Baking time: 60 s {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" |- | 800px |- | colspan="1" style="t...") | ||||
| 11:42 | Upload log Thope talk contribs uploaded File:MaN2400spincurve.png (File uploaded with MsUpload) | ||||
| 10:48 | Specific Process Knowledge/Etch/Etching of Aluminium diffhist −1 Taran talk contribs (→Comparison of Aluminium Etch Methods) | ||||