Specific Process Knowledge/Characterization/Optical microscope
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Nikon SMZ 1000 | Noco IR | Leica INM 100 | Nikon Eclipse L200 #2 | Zeiss Jenatech | Nikon Eclipse L200 #1 | Leitz Medilux | Nikon Eclipse L200N #3 | Nikon Eclipse L200N #4 | Nikon ME 600 | Leica S8 APO | Zeiss Axiotron | |
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Location | 346-901 | 346-901 | 346-901 | cleanroom B1 | cleanroom A1 | cleanroom D3 | cleanroom D3 | cleanroom E4 | cleanroom E5 | cleanroom F1 | cleanroom F2 | cleanroom F3 |
Responsible group | Wet chemistry | Wet chemistry | Wet chemistry | Thin Film | Thin Film | Thin Film | Thin Film | Lithography | Lithography | Thin Film | Thin Film | Lithography |
Objectives | Zoom 0.8x - 8x |
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Zoom 1x - 8x |
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Ocular | 10x | 10x | 10x | 10x | 10x | 10x | 10x | 10x | 10x | 10x | 10x | 10x |
Special features | Stereoscopic microscope | IR imaging |
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Stereoscopic microscope | ||||||||
Contrast mechanisms |
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Illumination modes |
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Camera | None | IR camera | DS-Fi2 | DS-Fi1 | None | DS-Fi1 | DX40-274FW |
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DS-Fi2 | None | Infinity X |
Analysis software | None | None | NIS-D | NIS-D | None | NIS-BR | Kappa Control Center | NIS-D | NIS-D | NIS-D | None | DeltaPix |
There are also two optical microscopes in Packlab, a stereo microscope in room 347-179B and a transmission microscope in room 347-177