Template:Maximus: AZ5214E

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Revision as of 12:01, 5 November 2007 by Elk (talk | contribs)

Maximus can be used for spinning on 2", 4" and 6" substrates. Right now we only have few recipes for the standard thicknesses, but we are working at it. Please address you suggestions to Photolith Team in case you have some special needs.

  • for 4" substrates 1,5 um resist use flow 1,5 4inch
  • for 6" substrates 1,5 um resist use flow 1,5 6inch

For the flow description read this document.

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