Specific Process Knowledge/Etch/DRIE-Pegasus/SPTSdocs: Difference between revisions

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== SPTS documents on information ==
== SPTS documents on hardware ==


[[Media:Pegasus_sheet_V8.pdf‎ |Hardware Information - Overview]].
[[Media:Pegasus_sheet_V8.pdf‎ |Hardware Information - Overview]].

Revision as of 12:39, 26 November 2012

SPTS documents on hardware

Hardware Information - Overview.

Hardware Information - Detailed.

The Advantages the Pegasus has over existing Si etchers.

Robot Handling System Information .

Process applications

MEMS in Aerospace.

Bio Medical.

MEMS in Energy.

Nanotechnology.

Packaging Applications.

General Applications.

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